(1.北京科技大学 材料科学与工程学院， 北京 100083;
2.太原理工大学 表面工程研究所，太原 030024)
摘 要: 观察了双层辉光渗金属过程中源极溅射后的成分以及形貌，利用X射线衍射对源极溅射表面进行了相分析，并且用Thermo-cale软件进行了相计算。结果表明：在辉光溅射条件下源极的成分和形貌发生了较大的变化，溅射后源极表面主要析出相为μ相和Laves相，用Thermo-cale软件热力学相计算结果与X射线衍射结果基本吻合。
关键字: 双层辉光；多元共渗；溅射
double glow plasma
（1.School of Materials Science and Engineering，
University of Science and Technology Beijing,
Beijing 100083，China;
2.Research Institute of Surface Engineering，
Taiyuan University of Technology，
Taiyuan 030024，China）
Abstract:The chemical compositions and morphologies of source cathode after sputtering by double glow plasma surface alloying technique were analyzed. The phases in sputtered surface were analyzed by XRD and calculated by Thermo-calc corresponded. The results show that considerable changes on compositions and morphologies occur in the source cathode at the glow plasma sputtering. μ phase and Laves phase are determined as the main precipitation in the source cathode surface after sputtering, and the calculation results are in agreement with XRD results.
Key words: double glow; multi-element surface alloying; sputtering
