(1. 四川大学 物理系 辐射物理及技术教育部重点实验室， 成都 610064；
2. 中国核动力研究设计院 核燃料及材料国家重点实验室， 成都 610041)
摘 要: Ti-2Al-2.5Zr合金中注入能量为75keV的N+离子，注入剂量为3×1017/cm2和8×1017/cm2，注入过程样品的温度低于200℃。N+离子在Ti-2Al-2.5Zr合金中的射程借助TRIM 96程序计算为1222Å。注入后的样品用X射线衍射方法(XRD)以及光电子能谱方法(XPS)进行分析。XRD衍射谱表明有新相生成，经分析为TiN和TiO2，但这些新相的峰非常微弱，很难区分。XPS宽程扫描谱表明注入后样品表面主要为Ti，C，N和O。XPS关于Ti2p和N1s窄程扫描谱表明N+离子注入后在合金表面确实形成了TiN和TiO2。
关键字: Ti-2Al-2.5Zr合金； N+离子注入； XRD； XPS
implantation into Ti-2Al-2.5Zr alloy
（1. Department of Physics， Key Laboratory for Radiation Physics and Technology of
Ministry of Education， Sichuan University， Chengdu 610064， P.R.China；
2. National Key Laboratory for Nuclear Fuel and Material，
Nuclear Power Research and Designing Institute of China， Chengdu 610041， P.R.China）
Abstract:Ti-2Al-2.5Zr alloys were implanted with 75keV N+ ions at temperature lower than 200℃ with implanting dosage of 3×1017/cm2 and 8×1017/cm2. The projected range was about 1222Å calculated by TRIM 96 program. The implanted samples were analyzed using X-ray diffractometer (XRD) and X-ray photoelectron spectrometer (XPS). The X-ray diffraction patterns show that the peaks correspond to new phases， TiN and TiO2 after N+ ion implantation. But the peaks for the phases are small and difficult to distinguish. XPS surveys show there are Ti，C，N and O. High-resolution XPS collections of the Ti2p and N1s binding energy show that TiN and TiO2 are formed after N+ ion implantation.
Key words: Ti-2Al-2.5Zr alloy; N+ ion implantation; XPS; XRD
