(清华大学 材料科学与工程系 先进材料教育部重点实验室，
北京 100084)
摘 要: 采用超高真空电子束蒸镀方法制备了Fe/Ru多层膜， Ru层厚度固定为2 nm， Fe层厚度为0.6～5 nm， 研究了Fe层厚度的变化对薄膜结构及其磁性能的影响。 Fe层厚度小于5 nm时， 受Ru层HCP结构的影响， Fe层生长为六方晶格的亚稳相。 多层膜呈现明显的平面易磁化特性， 并随Fe厚度降低而减弱。 Fe的平均原子磁矩和Fe层厚度的倒数存在线性关系， 与死层理论预言的结果相一致。 实验结果证实， 亚稳相六方晶格的Fe具有铁磁性， 其平均原子磁矩计算值为1.9μB， 略低于BCC Fe， Fe/Ru界面层的死层厚度为0.25 nm。
关键字: Fe/Ru多层膜； 电子束蒸镀； 磁性； 死层； 亚稳相
（ Key Laboratory of Advanced Materials of Ministry of Education,
Department of Materials Science and Engineering, Tsinghua University,
Beijing 100084, China）
Abstract: Fe/Ru multilayers were prepared by ultra-high vacuum electron-gun evaporation with Ru film thickness of 2 nm and Fe film thickness of 0.6-5 nm. The structure and magnetic properties of Fe/Ru multilayers were investigated. A metastable HCP Fe phase is obtained when thickness of Fe film (tFe) is less than 5 nm. Magnetic measurement indicats that the metastable HCP Fe phase exhibits ferromagnetic behavior and has a magnetic moment of 1.9μB, which is a little less than BCC Fe. A linear relationship of the magnetic moment per atom versus 1/tFe is obtained which is in correspondence with “dead layer” theory very well. The interface thickness (dint=0.25 nm) is calculated which is less than reported before. It indicats that the preparation method affects the interface thickness.
Key words: Fe/Ru multilayers; electron-gun evaporation; magnetic properties; dead layer; metastable HCP iron
