(国防科技大学 材料工程与应用化学系， 长沙 410073)
摘 要: 采用磁控溅射法制备了TbDyFe超磁致伸缩非晶薄膜， 研究了真空热处理退火及软磁性Fe薄膜的交换耦合作用对TbDyFe超磁致伸缩的低场磁致伸缩性能的影响。 研究结果表明： 真空退火处理通过改善薄膜的微结构及应力状态， 有效地提高薄膜了的低场磁敏性能； 易磁化方向平行于膜面的软磁Fe膜的复合， 使薄膜平行于膜面的易磁化性能大大提高， 复合薄膜的强制磁致伸缩系数（dλ/dH）提高3倍以上。 单层薄膜厚度越小， 交换作用越强， 低场磁致伸缩性能越好； 当薄膜厚度大于交互作用距离、 薄膜的总厚度不变时， 单层薄膜的厚度变化对复合薄膜的磁致伸缩性能没有影响。
关键字: TbDyFe薄膜； 超磁致伸缩； 磁控溅射； 磁性复合
（Department of Material Engineering and Applied Chemistry,
National University of Defence Technology,
Changsha 410073, China）
Abstract: Amorphous TbDyFe giant magnetostriction film was prepared by magneto sputtering. The effects of vacuum annealing and coupling of Fe layer between the TbDyFe films on their magnetostrictive characteristics were investigated, respectively. The results show that the annealing treatment can promote the magnetostrictive sensibility of the amorphous single-layer film. For the TbDyFe/Fe multi-layer film, especially, the value of dλ/dH is three times of that of the single-layer film. The smaller the thickness of each layer is, the better its magnetostrictive properties are.
Key words: TbDyFe film; giant magnetostriction; magneto sputtering; magnetic coupling
