( 1. 合肥工业大学 材料科学与工程学院，合肥 230009;
2. 中国科学院 固体物理研究所， 合肥 230031)
摘 要: 采用二次阳极氧化的方法， 制备出高度有序的氧化铝有序阵列模板。 研究了热处理工艺、 电解液浓度、 温度等因素对氧化铝有序阵列模板孔洞有序性的影响， 结合扫描电镜和透射电镜对其结构、 形貌进行观察和表征， 讨论了有序孔洞形核与长大、 自组织生长导致有序性的机理。 回顾和总结了近年来有关阳极氧化铝模板的制备方法和国内外有关阳极氧化铝模板的应用进展。
关键字: 阳极氧化铝; 纳米有序阵列; 模板; 制备工艺
（ 1. Faculty of Materials Science and Engineering,
Hefei University of Technology, Hefei 230009, China;
2. Institute of Solid State Physics,
Chinese Academy of Sciences, Hefei 230031, China）
Abstract: The highly ordered template of alumina was prepared by means of twice anodic oxidation. The affecting factors involved in the ordered extent and pore size in porous anodic alumina template were concluded from heat process, electrolyte concentration and temperature, etc. Based on the observation and characterization of microstructure and morphology by scanning electron microscopy and transmission electron microscopy, the mechanisms were discussed about order pore of nucleation and growth and the ordered property leaded by self-organized growth. The development of preparation and applications of anodic alumina template was reviewed in recent years.
Key words: anodic alumina; nanoscale ordered array; template; fabrication precess
