(兰州空间技术物理研究所 真空技术与物理重点实验室，兰州730000)
摘 要: 阐述了非蒸散型吸气材料的工作机理，从压制型、多孔烧结型和薄膜型三大类介绍了非蒸散型吸气材料的发展历程，并对各类吸气材料存在的问题进行了分析，压制型合金的机械强度较低、多孔烧结型合金的激活温度较高以及薄膜型合金的吸气容量较低。然后对非蒸散型吸气材料的改性研究进行了概述，改性方法主要有合金化法、表面镀层法以及活性表面最大化法。最后，对非蒸散型吸气材料的研究趋势进行了展望，并指出非蒸散型吸气材料仍需解决的问题。
关键字: 非蒸散型吸气材料；工作机理；激活温度；吸气性能
（Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China）
Abstract:Non-evaporable getter extracts active gases to obtain and maintain high vacuum degree after sealing off the electric-vacuum devices, so its gettering characteristics directly affect the performance of devices even determine whether the device can work properly. First, the mechanism of non-evaporable getter was briefly introduced, and the latest advance in non-evaporable getter, comprising powder-pressed, porous sintered and film types, was reviewed. Besides, problems with various getters were analyzed, it is found that the mechanical strength of powder-pressed alloy is low, the activation temperature of porous sintered alloy is high, and the absorption capacity of film alloy is low. Then, modification techniques of non-evaporable getter, including alloying, surface coating and active surface maximization method, were summarized. Finally, the development trends and the unresolved technical problems of non-evaporable getter materials were pointed out as well, in a thought provoking way.
Key words: Non-evaporable getter, working mechanism, activation temperature, properties of getter
