(哈尔滨工业大学 机电工程学院，哈尔滨 150001)
摘 要: 微纳器件已经广泛应用于光学、电子、医学、生物技术、通信、航空航天等领域，研究金属材料在纳米尺度下的变形特性及材料的去除机理对实现微纳器件的功能具有重要意义。利用分子动力学(Molecular dynamics, MD)模拟方法可以实现对纳米加工过程的“实时在线”观察，从而能够更好地理解金属材料的纳米加工机理。从纳米压痕和纳米加工两个方面，阐述近年来金属材料纳米加工机理的研究进展，指出目前MD模拟方法的一些不足并提出几个改进建议。
关键字: 分子动力学；金属材料；加工机理；纳米切削；纳米压痕
（School of Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin 150001, China）
Abstract:Micro-nano devices are widely used in the fields of optics, electronics, medicine, biotechnology, communication, aerospace and other fields. It is of great significance to study the deformation characteristics of metallic materials at the nanometer scale and the removal mechanism of materials to realize the function of micro-nano devices. Molecular Dynamics (MD) simulation methods can be used to achieve "real-time online" observation of nanofabrication process, so as to better understand the nanofabrication mechanism of plastic materials. From the aspects of nanoindentation and nanofabrication, the research progress of nanomaterial processing mechanism of metallic materials in recent years was expounded. Some shortcomings of current MD simulation methods were pointed out and several suggestions for improvement were put forward.
Key words: molecular dynamics; metallic material; processing mechanism; nano-cutting; nanoindentation
