(1. 华南理工大学 材料科学与工程学院，广州 510641 2. 广州今泰科技股份有限公司，广州 510000)
摘 要: 以铜箔为基底，采用常压化学气相沉积(APCVD)方法制备石墨烯，控制总气体流量不变，改变甲烷流量(甲烷流量与总气体流量之比)，利用RAMAN、SEM、分光光度计、四探针电阻率测试仪等对样品的形貌、结构、透光率及导电性能进行表征，讨论甲烷流量比改变对石墨烯生长过程和性能的影响。结果表明：甲烷流量比越大，甲烷分解出的碳原子越多，铜箔表面覆盖石墨烯越完整。当甲烷流量比增加到一定程度时，会得到过量的碳原子形成碳原子团聚集在铜箔表面。甲烷流量比越大，所制备的石墨烯ID/IG比值越大，缺陷越多，导电性降低。石墨烯的透光性受到层数和缺陷的制约，当甲烷流量比为20%时，透光率最高，波长550 nm处透光率达到86%。
关键字: 石墨烯；常压化学气相沉积(APCVD)；生长过程；光电性能
（1. School of Material Science and Engineering, South China University of Technology, Guangzhou 510641, China; 2. Guangzhou GrandTech Company Limited, Guangzhou 510000, China）
Abstract:Graphene films were prepared by atmospheric pressure chemical vapor deposition (APCVD) method using cooper foils as substrates. The morphology and structure of graphene were tested by SEM and Raman spectroscopy, and the optical and electrical properties were analyzed by UV spectrometer and four-probe instrument. The influences of various methane flow percentage in a certain total flow on the growth and properties of the prepared graphene were studied. The results show that with the increase of methane flow percentage, there are more carbon atoms decomposed by methane, and more area is covered by graphene. When methane flow percentage increases to a certain extent, there is an excess of carbon atoms which is responsible for carbon aggregation forming the clusters on the surface of Cu foil. Meanwhile, with the increase of methane flow percentage, the ID/IG ratio increases, which means there are more defect of graphene and the deterioration of electrical conductivity. The transparency of grapheme film is controlled by its thickness and defects, which can be 86% at 550 nm in wavelength, when the methane flow percentage is 20%.
Key words: graphene; atmospheric pressure chemical vapor deposition (APCVD); growth; property
