(上海大学 材料科学与工程学院，上海 200072)
摘 要: 在不同光发射谱(OEM)条件下，采用闭合场非平衡磁控溅射技术(CFUBMSIP)在SDC99冷作模具钢表面沉积CrTiAlN涂层，采用X射线衍射仪(XRD)、显微硬度仪、原位纳米力学测试系统和销盘摩擦磨损试验机(POD)测试分析涂层的相结构、表面硬度以及耐磨损性能。结果表明：各条件下制备的CrTiAlN涂层均为FCC结构，且在(200)晶面择优取向；光发射谱值为65时，制备的CrTiAlN涂层具有较高的表面承载能力以及膜基结合力，纳米硬度和弹性模量分别为22.7 GPa和276.4 GPa；OEM65制备的CrTiAlN涂层较OEM70、OEM80制备的CrTiAlN涂层具有更低的摩擦因数和磨损率，表现出更佳的摩擦磨损性能。
关键字: CrTiAlN涂层；光发射谱；SDC99冷作模具钢；非平衡磁控溅射；磨损
（School of Materials Science and Engineering, Shanghai University, Shanghai, 200072, China）
Abstract:Under different conditions of optical emission monitor (OEM), the CrTiAlN coatings were deposited on cold-work die steel SDC99 by closed-field unbalanced magnetron sputtering ion plating (CFUBMSIP) technique. The microstructural, mechanical and tribological properties of coatings were characterized by means of X-ray diffractometry (XRD), microhardness tester, nano indenter test system and pin-on-disc (POD) tribometer. The experimental results show that all of CrTiAlN coatings exhibit FCC crystal structure with (200) preferred orientation. Compared to the coatings deposited under OEM values of 65 and 80, CrTiAlN coatings prepare under OEM value of 65, which shows higher bearing capacity and adhesive force between the coating and the substrate, and the nanohardness and elastic modulus are 22.7 GPa and 276.4 GPa, respectively, as well as a lower friction coefficient and wear rate.
Key words: CrTiAlN coating; optical emission monitor; cold work die steel SDC99; closed-field unbalanced magnetron sputtering; wear
