(广东工业大学 机电工程学院，广州 510006)
摘 要: 采用电弧离子镀制备不同氧含量的Cr-Al-Si-O-N涂层，研究氧含量对纳米复合涂层的组织结构和力学性能的影响。结果表明：随着氧氮流量比从0增加到25%时，涂层中的氧含量从0增加到51.8%(摩尔分数)，而氮含量从33.5%逐渐减少到9.8%；CrAlSiON涂层主要以面心立方结构的(Cr,Al)N固溶体形式存在，其择优取向为(111)和(200)。随着氧含量的增加，涂层的硬度呈先增加后减小的趋势；当氧氮流量比为10%时，硬度达到最大值3349 HK。由于氧化物的存在，含氧涂层在高温高速的摩擦中表现出优异的性能，具有较低的摩擦因数。
关键字: Cr-Al-Si-O-N；电弧离子镀；氧含量；组织结构；力学性能；高温摩擦
（School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China）
Abstract:Cr-Al-Si-O-N coatings with different oxygen contents were deposited by cathode arc ion plating. The effects of oxygen contents on the microstructure and mechanical properties of the nano-composite coatings were investigated. The results indicate that the oxygen content in the films increases from 0 to 51.8% (mole fraction) while the nitrogen content decreases from 33.5% to 9.8% with increasing the flow ratio of O2/(O2+N2) from 0 to 25%. The CrAlSiON coatings are mainly comprised of FCC-(Cr,Al)N solid-solution structures, (111) and (200) preferred crystalline orientation exists in the films. With the increase of oxygen contents, the hardness shows a trend of decrease after the first increase, and the highest film hardness is 3349 HK at the flow ratio of O2/(O2+N2) of 10%. As a result of the existence of oxide, the oxygen coatings remain lower friction coefficient, and show excellent performance at high temperature and high speed friction.
Key words: Cr-Al-Si-O-N; multi-arc ion plating; oxygen content; microstructure; mechanical property; high temperature friction
