中国有色金属学报(英文版)
Transactions of Nonferrous Metals Society of China
| Vol. 25 No. 10 October 2015 |
（1. School of Materials Science and Engineering, Central South University, Changsha 410083, China;
2. Institute of Systems Engineering, China Academy of Engineering Physics, Mianyang 621900, China;
3. State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China）
Abstract:The microscopic mechanical characteristics of ultranano-crystalline diamond films which were prepared in four different atmospheres were investigated for the applications in microelectron-mechanical system (MEMS). The loading-unloading curves and the change of modulus and hardness of samples along with depth were achieved through nanoindenter. The results show that the films which are made in atmosphere without Ar have the highest recovery of elasticity, hardness (72.9 GPa) and elastic modulus (693.7 GPa) among the samples. Meanwhile, samples fabricated at a low Ar content have higher hardness and modulus. All the results above demonstrate that atmosphere without Ar or low Ar content leads to better mechanical properties of nanodiamond films that are the candidates for applications in MEMS.
Key words: ultranano-crystalline diamond film; nanoindentation; mechanical properties; microelectron-mechanical system (MEMS)
