(1. 中国科学院 金属研究所 专用材料与器件研究部，沈阳 110016；
2. 大连理工大学 三束材料改性教育部重点实验室，大连 116024；
3. 中国科学院 金属研究所 金属腐蚀与防护实验室，沈阳110016)
摘 要: 采用磁场增强电弧离子镀技术，通过改变位于靶材后方的轴向磁场强度，在2024Al合金表面沉积CrN薄膜，研究磁场强度对薄膜显微组织、显微硬度及耐腐蚀性能的影响。结果表明：随着磁场强度的增加，CrN薄膜结构由Cr2N与CrN的混合相逐渐转变为CrN的单一相结构；磁场强度对薄膜表面形貌有明显影响，随着磁场强度的增加，薄膜表面小颗粒的数量逐渐减少，较大尺寸颗粒的数量有所增加；CrN薄膜的显微硬度和弹性模量在磁场强度为7960 A/m时达到最大值，分别为23.9 GPa与392.6 GPa；CrN薄膜的阳极极化曲线的腐蚀电位随着磁场强度的增加先增加而后降低，在磁场强度为3184 A/m时，具有最大值，即具有较好的抗腐蚀性。
关键字: CrN薄膜；磁场；电弧离子镀；显微组织；耐腐蚀性
（1. Specialized Materials and Devices Division, Institute of Metal Research,
Chinese Academy of Sciences, Shenyang 110016, China;
2. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Ministry of Education,
Dalian University of Technology, Dalian 116024, China;
3. Laboratory of Metal Corrosion and Protection, Institute of Metal Research,
Chinese Academy of Sciences, Shenyang 110016, China）
Abstract:The CrN films were prepared using magnetic field-enhanced arc ion plating on 2024 Al alloy substrates, and the effect of axial magnetic field intensity behind the cathodic target on microstructure, microhardness and corrosion properties of film was investigated. The results show that, with the increase of the magnetic field intensity, the complex structures of Cr2N and CrN phase in the CrN films change to single phase of CrN, magnetic field has obvious effect on surface morphologies of film, the number of smaller particles reduces and the number of larger particles increases. When the magnetic field intensity is 7960 A/m, the microhardness and elastic modulus of the films reach the maximum values, which are 23.9 GPa and 392.6 GPa, respectively. The corrosion potentials of polarization curves firstly increase, and then decrease with the increase of the magnetic field intensity. The maximum value of the corrosion potential is obtained at the magnetic field intensity of 3184 A/m, namely, corresponding to the best corrosive resistance.
Key words: CrN film; magnetic field; arc ion plating; microstructure; corrosion resistance
