(1. 江西理工大学 材料科学与工程学院，赣州 341000；
2. 江西理工大学 钨资源高效开发及应用技术教育部工程研究中心，赣州 341000；
3. 中国科学院 宁波材料技术与工程研究所 海洋新材料与应用技术重点实验室，宁波 315201)
摘 要: 采用多弧离子镀技术在硅片和316L不锈钢上制备了CrN和CrCN涂层，利用扫描电镜(SEM)、电子能谱(EDS)、透射电镜(TEM)、X射线光电子能谱仪(XPS)对其表面形貌及成分进行表征，采用纳米压痕仪、划痕测试仪及摩擦磨损试验机测试涂层力学及摩擦学性能，观察试样磨损形貌，并分析其磨损机理。结果表明：较之于CrN涂层，所制备的CrCN涂层具有更均匀、致密的结构，与基体结合良好；涂层主要成分为Cr、C和N，其中C元素主要以sp2、sp3和C—Cr键的形式存在；CrCN涂层中由于强化相Cr7C3的产生和杂化C的形成等多种强化作用，显著提高了其硬度和耐摩擦磨损性能。
关键字: CrCN涂层；CrN涂层；显微组织；硬度；摩擦；磨损性能
（1. School of Materials Science and Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China;
2. Engineering Research Center of High-efficiency Development and Application Technology of Tungsten Resources, Ministry of Education, Jiangxi University of Science and Technology, Ganzhou 341000, China;
3. Key Laboratory of Marine New Materials and Related Technology,
Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China）
Abstract:CrN and CrCN coating were prepared on single crystal Si and 316L stainless steel by arc ion plating. The surface morphology, microstructures, phase compositions and performance of the CrCN coating were characterized by SEM, EDS TEM, XRD, XPS, EDS, nanoindentation, scratch test and wear tester. The surface morphologies after wear were observed and the wear mechanism was discussed. The results show that CrCN coating has obvious flaws and better bond with the matrix than CrN coating. The composition of CrCN coating mainly contains Cr, C and N. sp2, sp3 and Cr—C bonds dominate in the carbon bonding. Because of the reinforced Cr7C3 particulate and the formation of hybrid carbon, the hardness, tribological properties and wear resistant of CrCN coating can be enhanced.
Key words: CrCN coating; CrN coating; microstructure; hardness; wear; tribological property
