中国有色金属学报(英文版)
Transactions of Nonferrous Metals Society of China
| Vol. 22 Special 3 December 2012 |
（1. Nano Machining Laboratory, Korea Institute of Machinery and Materials, Daejeon 305-343, Korea;
2. Department of Nano-Mechatronics, University of Science and Technology, Daejeon 305-350, Korea;）
Abstract:The ultrafast laser based hybrid machining system was studied and a novel approach was demonstrated to improve laser machining quality on metals by vibrating the optical objective lens with a low frequency (500 Hz) and various displacements (0?16.5 μm) during a femtosecond laser machining process. The laser used in this experiment is an amplified Ti:sapphire femtosecond (10?15 s) laser system that generates 100 femtosecond pulses having an energy of 3.5 mJ/pulse with a 5 kHz repetition rate at a central wavelength of 790 nm. It is found that both the wall surface finish of the machined structures and the aspect ratio obtained using the frequency vibration assisted laser machining are improved compared with those derived via laser machining without vibration assistance.
Key words: femtosecond laser; hybrid machining; vibration-assisted machining; surface roughness; aspect ratio
