(中南大学 粉末冶金国家重点实验室，长沙 410083)
摘 要: 通过冷态输送ZrCl4粉末，利用低压化学气相沉积法在C/C复合材料表面制备ZrC涂层。采用X射线衍射和扫描电镜研究沉积温度和沉积位置对ZrC涂层物相成分和微观形貌的影响。结果表明：在1 400~1 600 ℃时，沉积涂层物相均为单一的ZrC。ZrC晶粒择优取向随沉积温度的升高而发生变化；在1 400和1 500 ℃时，ZrC晶粒择优取向面为(200)；1 600 ℃时，晶粒择优取向面转变为(220)和(200)，且择优不明显；随着沉积温度的进一步升高，涂层晶粒尺寸明显增大，涂层表面ZrC颗粒由球形逐渐转变为金字塔形多面体。在1 400~1 600 ℃沉积时，反应器的−100~ −230mm沉积区间内可以得到成分单一、择优取向一致、表面形貌相同的ZrC涂层。
关键字: ZrC涂层；低压化学气相沉积；相组成；显微组织；均匀性
（State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China）
Abstract:ZrC coatings were deposited on C/C composites by low pressure chemical vapor deposition (LPCVD) at different temperatures, and the ZrCl4 powders were transported in solid state. X-ray diffractometry and scan electron microscopy were employed to investigate the effects of deposition temperature and position on the phases and surface morphologies of ZrC coatings. The results show that the coatings are composed of cubic ZrC in the temperature range from 1 400 ℃ to 1 600 ℃. The preferred orientation of the ZrC coatings varies with the growth temperature increasing. At 1 400 and 1 500 ℃, the preferred orientation of the ZrC coating is (200), but it changes to (220) and (200) at 1 600 ℃. As temperature increasing, the grain size increases and the shape of the grains changes from spherical to tetrahedral pyramid. Within the temperature range from1 400 ℃ to 1 600 ℃, the ZrC coatings with uniform phase, orientation and surface morphology are deposited in the reactor scale from −100 mm to −230 mm.
Key words: ZrC coating; low pressure chemical vapor deposition; phase composition; microstructure; homogeneity
