(中南大学 材料科学与工程学院,长沙 410083)
摘 要: 氧化锌铝是一种具有广阔应用前景和发展潜力的复合氧化物半导体材料。介绍ZAO材料的透明导电性、光致发光和红外发射等典型性能;讨论溶胶−凝胶法、水热法、沸水回流法和共沉淀法等粉体制备方法;阐述ZAO靶材的制备方法;分析溶胶−凝胶、金属化学气相沉积、磁控溅射、脉冲激光沉积和热喷雾分解等ZAO薄膜的制备技术;最后指出ZAO的发展方向。
关键字: 氧化锌铝;典型性能;制备技术;粉体;靶材;薄膜
(School of Materials Science and Engineering, Central South University, Changsha 410083, China)
Abstract:The Al-doped-ZnO (ZAO) is a kind of complex oxide semiconductor with wide application prospect and development potentiality. The typical properties, such as transparent conductivity, photoluminescence and infrared reflection, were introduced. Several synthesis processes, such as sol-gel method, hydrothermal method, refluxing method and co-precipitation method, were discussed. The preparation processes of ZAO were expounded. The preparation technologies, namely sol-gel method, metal chemical vapor deposition, magnetron sputtering, pulsed laser deposition and thermal spray of ZAO films were analyzed. Finally, the directions of research and development were described.
Key words: Al-doped-ZnO; typical properties; preparation processes; powder; targets; thin films