(1. 中南大学 物理科学与技术学院，长沙 410083；2. 中国科学院 金属研究所，沈阳 110001；
3. 中南大学 材料科学与工程学院，长沙 410083)
摘 要: 通过建立纳米铝膜/电介质复合材料的计算模型，用有限元软件Ansoft’s HFSS TM模拟纳米铝膜/电介质复合结构的电磁散射参数(S参数)，并利用S参数反演得到纳米金属Al膜的等效介电常数和磁导率。模拟和计算结果表明：在纳米金属膜/电介质复合结构中，反射率随薄膜厚度的增加而增加，透射率则随之减少；吸收率的峰位与薄膜厚度的变化没有关系，只与电介质厚度和介电常数有关；在X波段，随频率增加，薄膜等效介电常数实部逐渐增加，虚部逐渐减小；磁导率实部先出现振荡，后逐渐增加；虚部则先减小，后增加，再减小；薄膜厚度的变化对等效介电常数实部和磁导率影响不大，但对等效介电常数虚部的影响显著。
关键字: 纳米铝膜；有限元模拟；模拟软件；等效介电常数；磁导率
nano Al films by finite element simulation
（1. School of Physical Science and Technology, Central South University, Changsha 410083, China;
2. Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110001, China;
3. School of Materials Science and Engineering, Central South University, Changsha 410083, China）
Abstract:A calculation model of nanosized Al films/dielectric multilayers was established, By using finite element software Ansoft’s HFSS™, the electromagnetic scattering parameters of metal-dielectric composite layer structure were simulated. The effective dielectric constant and permeability of nanosized metallic films were calculated through S parameter retrieval method. The results show that the reflection of the composite structure is proportional to the film thickness, while the magnetic permeability is inversely proportional to the film thickness. The peak position of absorption is not determined by the film thickness but only related to the thickness and dielectric constant. The results obtained by finite element method and S parameter retrieval method indicate that, in X band, the real part of effective dielectric constant of the film is proportional to the frequency while the imaginary part decreases with increasing frequency. For permeability, its real part first vibrates, then increases with frequency. And its imaginary part first decreases, then increases and finally decreases with increasing frequency. In addition, the film thickness has little effect on the dielectric constant, and the real part of magnetic permeability has large influence on the imaginary part of the effective dielectric constant.
Key words: nanosized Al films; finite element simulation; simulation software; effective dielectric constant; magnetic permeability
