(1. 福州大学 物理与信息工程学院, 福州 350108；2. 福州大学 材料研究所, 福州 350108)
摘 要: 采用热分解法制备Ru-Ti-Ir-Ta四元金属氧化物钛阳极涂层。通过XRD、SEM、EDX和HRTEM等测试手段分析不同温度下钛阳极涂层的物相组织结构、晶粒大小、组元分布和微观形貌。结果表明：在500 ℃获得的涂层物相主要由等轴状的Ti基(Ti, Ru, Ir)O2 和Ir基(Ir, Ti, Ru)O2金红石固溶体构成，晶粒尺寸分别约为15 nm和8 nm，涂层形貌呈典型“泥裂状”，涂层表面出现一次裂纹和二次裂纹；在700 ℃获得的涂层组成相以Ir基(Ir, Ti, Ru)O2和Ti基(Ti, Ru, Ir)O2金红石固溶体为主，平均晶粒尺寸分别约为18 nm和12 nm，含有少量的平均晶粒尺寸约为29 nm的Ru基(Ru, Ti, Ir)O2金红石固溶体。3种固溶体的晶粒形貌均以等轴状为主，涂层表面形貌具有“泥裂状”特征，涂层表面出现一次裂纹、二次裂纹以及三次裂纹，Ir和Ru以固溶相的形式在二次裂纹边缘处析出。
关键字: Ru-Ti-Ir-Ta四元氧化物涂层；钛阳极；纳米材料；热处理
Ru-Ti-Ir-Ta quaternary oxide coating
（1. College of Physics and Information Engineering, Fuzhou University, Fuzhou 350108, China;
2. Institute for Materials Research, Fuzhou University, Fuzhou 350108, China）
Abstract:The Ru-Ti-Ir-Ta quaternary oxide titanium anode coatings were prepared by thermal decomposition. The phase structures, crystal sizes, element distributions, microstructures and morphologies of titanium anode coatings were analyzed by means of XRD, SEM, EDX and HRTEM. The results show that when heat-treated at 500 ℃, the main phases in the coating are rutile-type TiO2-based solid solution (Ti, Ru, Ir)O2 and IrO2-based solid solution (Ir, Ti, Ru)O2 in a form of quadrangular prism, and their grain sizes are about 15 nm and 8 nm, respectively. The titanium anode coating has distinctly dry cracked-mud in morphology. The coating contains primary cracks and secondary cracks. Comparatively, when heat-treated at 700 ℃, the main phases in the coating are similarly to those at 500 ℃, their grain sizes are about 18 nm and 12 nm, respectively. However, there exits a few RuO2-based solid solution (Ru, Ti, Ir)O2 particles whose sizes are 29 nm. All of the grains take a form of quadrangular prism. The titanium anode coating has the dry cracked-mud in morphology, and contains primary cracks, secondary cracks and third cracks. At the edge of the secondary cracks, Ir- and RuO2-based solid solutions (Ir, Ti, Ru) and (Ru, Ti, Ir)O2 are deposited.
Key words: Ru-Ti-Ir-Ta quaternary oxide coating; titanium anode; nanometer materials; heat treatment
