(福州大学 材料科学与工程学院，福州 350108)
摘 要: 采用离子束溅射沉积(IBSD)法在聚酰亚胺衬底上沉积不同厚度Sm-Fe GMFs；采用磁致伸缩测量仪测试制备态和不同温度真空退火后薄膜悬臂梁结构自由端偏转量；利用赫姆霍兹系统测量制备态和真空退火后薄膜的幅频特性。结果表明：在低频(0~100 Hz)范围内，检测到悬臂梁结构Sm-Fe GMFs共振现象，薄膜经过200 ℃真空退火后，其低场磁敏性明显提高，在74.1 Hz的频率下发生共振，其振幅可达到300 μm，比制备态时提高了约3倍；制备的Sm-Fe GMFs显示出优异的幅频特性，振动与驱动电流的响应曲线表现出很好的跟随性。
关键字: Sm-Fe GMFs；悬臂梁结构；低场磁敏性；频率；振幅
cantilever beam structure Sm-Fe GMFs
（College of Materials Science and Engineering，Fuzhou University，Fuzhou 350108, China）
Abstract:Sm-Fe GMFs with different thickness were fabricated by ion beam sputtering deposition (IBSD) on polyimide substrate. The deflection of cantilever beam end and the amplitude-frequency characteristic for the as-deposited film and the films after vacuum annealing treatment at different temperatures were investigated by magnetostrictive measuring instruments. The results show that the resonant phenomenon for cantilever beam structure of Sm-Fe GMFs films are discovered at low frequencies range(0−100 Hz). The magnetic sensitivity in low magnetic field is improved obviously after vacuum annealing treatment at 200 ℃, the resonance frequency of the film is 74.1 Hz, and the value of the amplitude can reach 300 μm, about 3 times higher than that of the as-deposited film. Sm-Fe GMFs show excellent low frequency characteristic, and the curve of resonance behaves consistent with the driving current curve.
Key words: Sm-Fe GMFs; cantilever beam structure; low field magnetic sensitivity; frequency; amplitude
