(1. 上海交通大学 材料科学与工程学院，上海 200240；
2. 上海交通大学 纳米技术及应用国家工程研究中心，上海 200241)
摘 要: 为了扩展在潮湿条件下WS2/MoS2复合薄膜的应用，使用WS2/MoS2作靶材，在Ar/C2H2气氛中通过反应溅射法制备WS2/MoS2/C复合薄膜。利用X射线衍射仪(XRD)、X射线能谱仪(EDX)、场发射扫描电子显微镜(FESEM)、MFT-4000材料表面性能试验仪表征薄膜的性能以便评价薄膜的微结构与摩擦性能的关系。结果表明：与纯MoS2薄膜相比，WS2/MoS2/C复合薄膜结构致密，硬度提高一个数量级；在潮湿的大气中复合薄膜的摩擦因数更低，抗磨损能力更强。
关键字: WS2；MoS2；C；摩擦性能；磨损性能
WS2/MoS2/C composite films
（1. School of Materials Science and Engineering, Shanghai Jiao Tong University,
Shanghai 200240, China;
2. National Engineering Research Center of Nanotechnology, Shanghai Jiao Tong University,
Shanghai 200241, China）
Abstract:In order to expand the application of WS2/MoS2 films under humid conditions, WS2/MoS2/C composite films were prepared in Ar/C2H2 atmosphere by magnetron reaction-sputtering with a WS2/MoS2 composite target. X-ray diffractometer, energy dispersive X-ray detector, field emission scanning electron microscope and MFT-4000 material surface property tester were used to investigate the relationship between the microstructure and the tribological performance of the films. The results show that the composite films have compact microstructures with lower friction coefficients and better wear resistances than pure MoS2 film under humid atmospheric conditions at room temperature, and their hardness is nearly increased by one order of magnitude.
Key words: WS2; MoS2; C; tribological property; wear property
