(大连大学机械系， 大连 116622)
摘 要: 选用4种不同的 N+注入剂量，即3×1017 、6×1017、9×1017和2×1018cm-2， 对 Ti-6Al-4V 合金进行离子注氮，使其表面形成一层改性层。通过俄歇电子能谱，分析了在钛基合金上注入不同剂量的氮离子后，其表面原子的分布情况。结果表明：最大浓度时的深度RP 和最大相对浓度Cmax 并不随注入剂量的增加而无限增大，注入剂量超过9×1017 cm-2 后， 最大浓度时的深度RP 将向试样表面移动；注入剂量超过6×1017 cm-2 后，最大相对浓度Cmax 将保持平稳状态。
关键字: 离子注入 钛基合金 俄歇电子能谱
（Department of Mechanical Engineering Dalian University, Dalian 116622）
Abstract:Ti-6Al-4V alloy was implanted in four kinds of nitrogen ion flux, 3×1017, 6×1017, 9×1017 and 2×1017 cm-2, to obtain a modification layer on its surface. The distribution of nitrogen atoms in the layer has been analyzed by means of Auger Electron Spectrum. The results show that the depth Rp corresponding to the maximum nitrogen concentration and the maximum relative nitrogen concentration Cmax do not rise limitlessly with the increase of nitrogen ion flux, and the Rp moves to the surface of the layer when nitrogen ion flux exceeds 9×1017 cm-2, Cmax remains stable when nitrogen ion flux exceeds 6×1017 cm-2.
Key words: ion implantation Ti-based alloy Auger Electron Spectrum
