Transactions of Nonferrous Metals Society of China The Chinese Journal of Nonferrous Metals

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中国有色金属学报

ZHONGGUO YOUSEJINSHU XUEBAO

第9卷    第2期    总第31期    1999年6月

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文章编号:1004-0609(1999)02-0323-04
W-Cu电子封装材料的气密性
王志法    刘正春     姜国圣

(中南工业大学材料科学与工程系,长沙 410083)

摘 要:  分析了传统熔渗法生产的W-Cu材料气密性差的工艺因素,采用加入一定数量的诱导铜的工艺方法进行压型,通过调整成型压力,使生坯中的W含量达到电子封装W-Cu15含钨量的标准,其余的Cu在熔渗时渗入。实验表明,加入1%~2 .5%的诱导铜的生坯在1350℃熔渗1.5h,其气密性可以达到满意的效果

 

关键字:     W-Cu合金        电子封装材料        气密性        诱导铜

HERMETICITY OF W-Cu COMPOSITES  FOR SEMICONDUCTOR PACKAGE
Wang Zhifa, Liu Zhengchun and Jiang Guoshen

Department of Materials Science and Engineering,
Central South University of Technology
,Changsha 410083, P. R. China

Abstract:The factors resulting in inferior hermeticity of W-Cu composites made by conventional process were analyzed and then a new process was introduced. Firstly, a small amount of inducing copper powder was mixed with the W powder. Then the mixed powder was directly pressed into green compacts of required density. Finally the balance of the copper was added by infiltrati ng method. It is indicated that when the compact contains 1%~2.5%(mass fraction ) inducing copper and is infiltrated at 1 350℃ for 1.5h, the hermeticity of the material is fairly satisfactory.

 

Key words:  W-Cu composite   hermeticity     inducing copper  infiltration

ISSN 1004-0609
CN 43-1238/TG
CODEN: ZYJXFK

ISSN 1003-6326
CN 43-1239/TG
CODEN: TNMCEW

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