(福州大学 材料科学与工程学院，福州 350108)
摘 要: 以离子束溅射沉积(IBSD)法制备的Sm-Fe系超磁致伸缩薄膜悬臂板为研究对象，通过ANSYS有限元分析法，对超磁致伸缩薄膜/盖玻片衬底悬臂板自由端挠度值的大小进行模拟计算，并模拟Sm-Fe薄膜、Sm-Fe/Fe复合膜的内部磁化状态。结果表明：在薄膜与衬底厚度比较小的情况下，悬臂板端点挠度值随薄膜厚度的增加而线性增加，且与衬底厚度近似成二次抛物线关系，有限元分析结果与实测情况吻合较好；Sm-Fe单层膜内部磁力线分布较均匀；在Sm-Fe/Fe复合膜中，由于Fe膜的负磁场效应，使Sm-Fe膜内的磁力线分布出现不均匀的现象，且磁感应强度比Sm-Fe单层膜小。
关键字: Sm-Fe薄膜；离子束溅射；有限元；磁致伸缩
Sm-Fe system film cantilever
（College of Materials Science and Engineering, Fuzhou University, Fuzhou 350108, China）
Abstract:Sm-Fe system giant magnetostrictive films were prepared by ion beam sputtering. The bending property of the giant magnetostrictive film/glass substrate cantilever was studied by finite element modeling. The internal magnetic states of the giant magnetostrictive films were simulated. The finite element analysis results show that the deflection is in direct proportion to the film thickness and quadratic parabola to the substrate thickness when the film thickness is much less than the substrate thickness. The analysis results are well comparable to the experiment ones. The internal magnetic field of Sm-Fe single film is uniform. Inside the Sm-Fe/Fe composite film, because of the negative magnetic effect of Fe film, the internal magnetic field of Sm-Fe film becomes nonuniform, and the magnetic induction is less than that of the Sm-Fe single film.
Key words: Sm-Fe film; ion beam sputtering; finite element; magnetostrictive
