(1. 华南理工大学 材料科学与工程学院，广州 510640；
2. 广东省世创金属科技有限公司，佛山 528313)
摘 要: 利用离子氮化形成过渡层，通过改变溅射沉积工艺参数，制备了TiAlCrN和TiAlCrN/CrN多层复合膜。采用电子探针(EPMA)、扫描电子显微镜(SEM)、X射线衍射仪(XRD)、纳米压痕仪及微米划痕仪等技术表征两种复合膜的成分结构和力学性能。结果表明：两种膜都是面心立方结构，TiAlCrN膜和TiAlCrN/CrN多层膜分别在(111)和(200)面具有一定的择优取向；TiAlCrN膜的结构和成分都比较均匀，而TiAlCrN/CrN多层膜的结构和成分则呈周期性变化。由于离子渗氮层的支撑作用及氮化物外延生长，TiAlCrN/CrN多层膜的显微硬度(3 450 HV)高于TiAlCrN膜的(2 500 HV)；两种膜都具有较高的膜基结合力，但TiAlCrN/CrN多层膜的综合力学性能比TiAlCrN膜的更好
关键字: TiAlCrN膜；TiAlCrN/CrN多层膜；电弧镀；硬度；结合性能
（1. School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China)
2. Guangdong Strong Metal Technology Co. Ltd., Foshan 528313, China）
Abstract:TiAlCrN and TiAlCrN/CrN composite coatings were prepared on the substrate of high speed steel (M2). The substrates were initially plasma nitrided (PN) to create a diffusion layer, and the arc ion plating was applied to deposit TiAlCrN and TiAlCrN/CrN multilayers. The microstructure of the deposited coatings was characterized by electron probe microanalysis (EPMA), scanning electron microscopy (SEM) and X-ray diffractometry (XRD). The results show that TiAlCrN and TiAlCrN/CrN coatings exhibit weak (111) and (200) orientations, respectively, though both of them have a crystal structure of FCC. The composition and microstructure of TiAlCrN coating are homogeneous and uniform. Compared with TiAlCrN coating, TiAlCrN/CrN multilayers tested by nanoindentation and microscratch with a periodic structure consisting of alternating TiAlCrN layer with thick of 400 nm and CrN layer with thick of 200 nm exhibit higher hardness of about 3 450 HV and higher adhesion strength of more than 100 N.
Key words: TiAlCrN coating; TiAlCrN/CrN multilayer coatings; arc ion plating; microhardness; adhesion properties
