(太原理工大学 表面工程研究所, 太原 030024)
摘 要: 用双层辉光放电在钛合金Ti6Al4V表面形成了Mo-N硬质镀层。 用X射线衍射仪和纳米压入仪分别对镀层的相结构、 硬度和弹性模量进行了研究,并用涂层压入仪对镀层与基体间的结合强度进行了测定。 结果表明: Ti6Al4V表面形成了均匀的Mo-N硬质镀层, 镀层厚约10μm, 由面心立方结构Mo2N化合物构成; Mo2N硬质镀层的硬度和弹性模量分别为13.80GPa和261.65GPa; 镀层与基体间具有较好的结合强度。
关键字: 双层辉光放电; 钛合金; 钼氮化合物
(Institute of Surface Engineering, Taiyuan University of Technology,
Taiyuan 030024, China)
Abstract:The Mo-N hard coating on Ti6Al4V substrate was formed by the double glow discharge technique. The phase, hardness and elastic modulus of the coating were analyzed with X-ray diffractometer and nano indentator respectively.The adhesive strength of the Mo-N hard coating/Ti6Al4V substrate system was investigated with coating indentator. The results show that, the thickness of Mo-N hard coating is about 10μm; the coating consists of fcc structure Mo2N; the hardness and elastic modulus of the coating are 13.80GPa and 261.65GPa respectively. The Mo-N hard coating/Ti6Al4V substrate system has good adhesive strength.
Key words: double glow discharge; Ti alloy; molybdenum nitride