多层膜
(1. 北京科技大学 材料科学与工程学院，北京 100083；
2. 中国科学院 力学研究所， 北京 100080)
摘 要: 用过滤电弧技术在高速钢表面沉积了TiN/TiCrN/CrN/CrTiN多层膜, 用扫描电镜（SEM）观察了截面和断口形貌及划痕后的形貌。 使用俄歇电子谱仪进行剥层成分分析，用纳米压痕仪测试了多层膜和单层膜的显微硬度和弹性模量。 结果表明， 在调制周期大于100nm时， 多层膜的显微硬度符合Hall-Petch关系， 在80nm时， 则脱离线性关系。 划痕法测试多层膜的结合力达到80N。
关键字: 显微硬度; 结合力; 多层膜
cathode vacuum arc
（1. College of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China;
2. Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, China）
Abstract:TiN/TiCrN/CrN/CrTiN multilayer hard coatings were deposited on high speed steel substrates using a filtered cathodic vacuum arc technique. Morphology and composition were characterized with scanning electron microscopy (SEM) and auger electron spectroscopy (AES). Nanoindentation tests were performed to determine force-displacement curves which were used to calculate elastic modulus and nanohardness of coatings as a function of modulation period. It was observed that hardness of multilayer coatings was increased with decreasing modulation period. But the values of elastic modulus was less than that of TiN. A deviation from the Hall-Petch type of strengthening was observed in TiN/TiCrN/CrN/CrTiN multilayer hard coatings at 80nm of modulation period. The result of coatings adhesion was up to 80N by scratch tester.
Key words: hardness; adhesion; TiN/TiCrN/CrN/CrTiN multilayer hard coatings
