(哈尔滨工业大学 材料科学与工程学院， 哈尔滨 150001)
摘 要: 用XPS和GXRD研究了铝合金等离子体基离子注入氮后再注入钛最后复合注入氮和钛改性层的成分深度分布及相结构，用XTEM观察了改性层截面的组织结构，用AFM观察了改性层的表面形貌，在此基础上测量了改性层的纳米硬度，进行了球-盘摩擦磨损试验。结果表明，钛中间层使复合改性层的厚度有效增加，主要由α-Ti，TiN及TiO2组成， 且TiN及TiO2弥散分布在α-Ti基材中，使表面形貌有所改善，使表面硬度及耐磨性明显提高。
关键字: 等离子体基离子注入；钛中间层；结构及性能
properties of modified layer produced by
plasma based ion implantation
（School of Materials Science and Engineering，
Harbin Institute of Technology，Harbin 150001，China）
Abstract:The structure of the aluminum alloy LY12 implanted with N, then with Ti, finally with N and Ti by plasma based ion implantation (PBII) was characterized using XPS, GXRD and XTEM. XPS shows that titanium layer makes the thickness of the modified layer lengthen effectively. GXRD shows that titanium layer consists of α-Ti, TiN and TiO2, with TiN and TiO2 dispersing in α-Ti substrate. Titanium layer also makes the surface appearance of the modified sample smoother than that of the sample without titanium layer. On the other hand, titanium layer makes the micro-hardness and tribological properties improve greatly.
Key words: plasma based ion implantation; titanium; structure and properties
