(华南理工大学 机电工程系， 广州 510640)
摘 要: 在p-Si(100)基体上用热丝CVD法沉积了球形金刚石薄膜。用XL30FEG扫描电镜、X射线衍射仪及Raman光谱仪对不同沉积时间的球形金刚石的微观形貌及组成成分进行了研究，并对其形成机制进行了分析。结果表明：球形金刚石的颗粒密度和形核密度一致，球形金刚石由微晶金刚石组成，晶粒尺寸为70～200nm；微晶金刚石是沉积过程中快速二次形核而形成，呈无序分布；球形金刚石薄膜以二次形核方式繁衍生长。
关键字: 金刚石；微晶；二次形核；化学气相沉积法
ball-like diamond
（Department of Mechanical and Electric Engineering，
South China University of Technology，Guangzhou 510640,China）
Abstract:Ball-like diamond films were deposited in p-Si(100) substrate by a hot-filament chemical vapor deposition (CVD) method. The morphology and composition of ball-like diamond films deposited in different time were studied by means of XL30FEG SEM，XRD and Raman spectrum，and the ball-like diamond forming mechanism was also analyzed. The results indicate that the density of ball-like diamond grain is the same as its nuclei density. A ball-like diamond grain composes of micro-crystals of diamond. The size of micro-crystal diamond is only 70～200nm. The micro-crystal diamonds come from fast second nucleating on deposit ion process and assume disordered state. The ball-like diamond films grow up by means of multiplying of second nucleating.
Key words: diamond；micro-crystal；second nucleating；chemical vapor deposition
