注入改性层XPS研究
(哈尔滨工业大学 材料科学与工程学院，哈尔滨 150001)
摘 要: 用XPS(X射线光电子能谱)和GXRD(小掠射角X射线衍射)研究了铝合金等离子体基离子注入氮再注入钛最后复合注入氮和钛改性层的成分分布及相结构，并用Gaussian-Lorentzion峰位拟合方法分析了改性层中不同深度处各元素的化学态及其在相结构中的分布。结果表明，复合改性层的表层有较高浓度的氮和钛，次表层有较高浓度的钛及一定浓度的氮，铝/钛界面有较宽的过渡区，基体中氮呈高斯分布。改性层主要由TiN，TiO2，α-Ti,TiAl3,Al2O3和AlN等组成,氮和氧还以固溶态的形式存在。最表层含有大量TiN及部分TiO2；次表层含有大量α-Ti及许多TiN；过渡层由TiO2,TiN,TiAl3,Al2O3和AlN等组成；注氮层包括AlN, Al2O3及α(Al)。各元素在相应相结构中的浓度分布与其成分深度分布基 本相似。
关键字: 铝合金；离子注入；等离子体；XPS
aluminum alloy implanted with
nitrogen and titani um by
plasma based ion implantation
（School of Materials Science and Engineering，
Harbin Institute of Technology，Harbin 150001，China）
Abstract:The composition and structure of LY12 alloy imp lanted with N, then with Ti, finally with N and Ti by plasma based ion implantation (PBII) was characterized using X-ray photoelectron spectroscopy (XPS) and glancing X-ray diffractometry(GXRD). The chemical state of elements at various depth in the modified layer w as analyzed using Gaussian-Lorentzion fitting criterion. The depth profiles show that the modified layer can be divided into four parts: the surface layer with higher content of N and Ti, the subsurface one with higher content of Ti and lower content of N, the transition one containing Ti, Al, O and N , and the N-implanted one. GXRD shows that the modified layer consists of TiN, TiO2 , α-Ti, TiAl3, Al2O3 and AlN. The fitting results indicate that the surface layer contains most TiN and some TiO2, the subsurface one holds most α-Ti and much TiN, the transition one covers TiO2, TiN, TiAl3, Al2O3 and AlN, and the N-implanted one includes AlN, Al2O3 and α(Al). There are al so some N-solid solution and O-solid solution in the modified layer. The fitting results still show that the distribution of each element in the corresponding phase is similar to that of XPS depth profiles.
Key words: aluminum alloy；ion implantation；plasma；XPS
