(1. 华南理工大学 机械电子工程系， 广州 510640；
2. 广东工业大学 材料与能源学院， 广州 510643)
摘 要: 研究了同时加入Fe与Cr进行改性的(TiFeCr)N多元膜的高温氧化行为。结果表明：当氧化温度高于600℃时，这种多元膜的氧化增质均低于TiN膜；800℃氧化后膜层完整，没有出现类似TiN膜的局部脱落现象。基体对多元膜的氧化产物无明显影响，700℃氧化后两种基体上的多元膜均转变为TiO2(金红石)；但基体对TiN膜的氧化产物却有明显影响，在Cu基体上膜层的氧化产物由TiO2及少量Ti3O5 组成，而玻璃基体上膜层的氧化产物则由Ti3O5 及少量TiO2组成。
关键字: 多元膜； 离子镀； 高温氧化
（1. Department Mechanical and Electronic Engineering,
South China University of Technology, Guangzhou 510640, P.R.China;
2. Faculty of Materials and Energy Sources, Guangdong University of
Technology,Guangzhou 510643, P.R.China）
Abstract: The high-temperature oxidation behavior of (Fe+Cr) modified (TiFeCr)N films was investigated. The results show that the mass gains of the multi-component films at the higher oxidation temperatures, over 600℃, were lower than those of TiN films. There was no local spallation similar to TiN films after treatment at 800℃ for 1h. The substrates had no evident effect on oxidation products of multicomponent films. Multicomponent films on the two substrate transformed into TiO2(Rutile) after the treatment at 700℃ for 1h. However the substrate had an evident effect on that of TiN films. The transformed products of TiN films on copper substrate consisted of TiO2(Rutile) and a few Ti3O5 , while these on glass substrate consisted of Ti3O5 and a few TiO2.
Key words: multi-component films; ion plating; high-temperature oxidation
