(哈尔滨工业大学 材料科学与工程学院，哈尔滨 150001)
摘 要: 用X射线光电子能谱（XPS）和小掠射角X射线衍射（GXRD）研究了铝合金LY12等离子体基离子注入氮/钛改性层的结构。结果表明，氮在注入层呈高斯分布，而钛沿注入方向逐渐减少。钛的注入对已注入的氮的分布有重要影响。钛的等离子体密度直接影响钛在改性层中的成分、相结构。改性层主要由TiO2, Al2O3,AlN,TiAl3, TiN或Ti组成。
关键字: 铝合金； 离子注入； 等离子体
implanted with N/Ti by PBII
（School of Materials Science and Engineering，
Harbin Institute of Technology，Harbin 150001, P.R.China）
Abstract:The structure of the aluminum alloy LY12 implanted with N/Ti by plasma based ion implantation (PBII) was characterized using X-ray photoelectron spectroscopy (XPS) and glancing X-ray diffraction (GXRD). XPS measurements show that N and Ti can be implanted into LY12 effectively, and the depth profile of N in the layer is near the Gaussian distribution, and that of Ti decreases gradually along the implanting direction. The process of implanting Ti has an important influence on the depth profile of the pre-implanted N. The plasma density of Ti can affect the composition and phases in the modified layer consisting of TiO2, Al2O3, AlN, TiAl3 TiN or Ti.
Key words: aluminum alloy；implantation； plasma
