(1. 射线束技术与材料改性教育部重点实验室，
北京师范大学 低能核物理研究所， 北京市辐射中心, 北京 100875;
2. 北京科技大学 材料科学与工程学院, 北京 100083；
3. 太原理工大学 表面工程研究所, 太原 030024)
摘 要: 研究了双层辉光放电条件下镍基合金Inconel 625的阴极溅射行为。结果表明：多组元镍基合金由于各组元溅射率不同，产生择优溅射现象。Mo，Nb等低溅射率元素在阴极表面富集，Ni，Cr等高溅射率元素在阴极表面贫化，使阴极表面发生相变，形成含Mo，Nb较高的金属间化合物析出相 P 相和Laves相。随着阴极溅射电压的增加，阴极合金元素溅射率增加；并且随着阴极温度升高，阴极溅射率也随之增加。
关键字: 双层辉光； 阴极溅射； 镍基合金
（1. Key Laboratory in University for Radiation Beam Technology and Materials Modification, Institute of Low Energy Nuclear Physics of Beijing Normal University,
Beijing Rediation Center, Beijing 100875, P.R.Chiha;
2. School of Materials Science and Engineering,
University of Science and Technology Beijing， Beijing 100083, P.R.China;
3. Surface Engineering Institute, Taiyuan University of technology，
Taiyuan 030024, P.R.China）
Abstract:The cathode sputtering of nickel base alloy Inconel 625 was studied in double glow discharge. The results show that the preferential sputtering effect is happened in Ni-Cr-Mo-Nb alloy as the deference of element sputtering rates. The content of lower sputtering rate elements Mo and Nb increases while the higher sputtering rate elements Ni and Cr decrease in the surface layer， and the intermetallic phases P and Laves containing high concentration of Mo and Nb precipitate in surface layer. The sputtering rate increases with the increase of the cathode voltage and the temperature.
Key words: double glow; cathode sputtering; nickel base alloy
