Transactions of Nonferrous Metals Society of China The Chinese Journal of Nonferrous Metals

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中国有色金属学报

ZHONGGUO YOUSEJINSHU XUEBAO

第11卷    第1期    总第40期    2001年2月

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文章编号:1004-0609(2001)01-0116-04
WC-8.0%Co基底上微波等离子化学气相沉积金刚石膜
刘 泉, 周 健, 余卫华, 刘桂珍

(武汉工业大学 材料复合新技术国家重点实验室,武汉 430070)

摘 要: 研究了基片预处理和工艺参数对微波等离子化学气相沉积金刚石涂层WC-8.0%Co刀具质量的影响,研究了提高成核密度和沉积速率的方法,用SEM,XRD,激光Raman光谱分析了金刚石涂层质量,用切削试验检测金刚石涂层与刀具基底的附着情况。结果表明,在1∶3的稀盐酸中酸洗15 min后用氨水浸泡10 min的基片处理方法能有效地抑制金属钴的溢出,从而提高金刚石涂层的质量,并且使刀具使用寿命提高10倍以上。

 

关键字: WC-Co 刀具; 金刚石膜; 微波等离子化学气相沉积

Technology of microwave plasma chemical vapor
deposition diamond coating upon WC-Co tools
LIU Quan, ZHOU Jian, YU Wei-hua, LIU Gui-zhen

State Key Laboratory of Advanced Technology for Materials Synthesis and Processing,
Wuhan University of Technology, Wuhan 430070, P.R.China

Abstract:The effects of substrate pretreatment and processing parameters on the quality of microwave plasma chemical vapor deposition (MPCVD) diamond coating upon WC-8.0%Co tools, and the method to improve the nucleation density and deposition speed were studied. The diamond coatings were analyzed with SEM, XRD and laser Raman's spectrometer, the adhesion of diamond coating was measured by cutting test. The results show that it can effectively control the penetration of cobalt and improve the quality of diamond coating and improve tool's life by 10 times when the substrate is pretreated in the condition of acid leaching in dilute HCl for 15 min and then soaking in dilute ammonia solution for 10 min.

 

Key words: WC-8.0%Co tools; diamond coating; MPCVD

ISSN 1004-0609
CN 43-1238/TG
CODEN: ZYJXFK

ISSN 1003-6326
CN 43-1239/TG
CODEN: TNMCEW

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