(1. 北京科技大学 理化系， 北京 100083;
2. 江西省科学院 应用物理研究所， 南昌 330029)
摘 要: 利用组合的二次回归正交实验设计方案，对钽低温离子渗氮条件下，表面物相及固溶体中氮的含量随渗氮温度、气氛总压力和氢氮摩尔比的变化进行了系统研究。发现表面渗氮层由化合物Ta6N2.57、超晶格TaN0.1和固溶体相组成。氮在钽中的固溶度随气压、温度和氢摩尔分数的增加而增加，化合物和超晶格相含量随温度增加而增加，同时化合物相随氢摩尔分数增加有一个极大值，该极大值随温度增加而下降。
关键字: 钽；离子渗氮；物相
ion-nitriding on phases structure of
nitriding layer of tantalum
（1. Department of Physical Chemistry，University of
Sciences and Technology Beijing，Beijing 100083, China;
2. Institute of Applied Physics，Jiangxi Academy of
Sciences, Nanchang 330029, China）
Abstract:The change of phase forming and nitrogen content in ion-nitriding layer of tantalum，at relatively low temperature as compared with its high melting point，with temperature，total pressure and hydrogen mole fraction was systematic ally researched by quadratic orthogonal regression experimental design. It is found that the surface layer is composed of compound Ta6N2.57，superlattice TaN0.1 and solid solution of nitrogen in tantalum. The amount of compound， super lattice and nitrogen in tantalum increases with temperature rising. And the account of compound phase has a maximum with the increasing of hydrogen mole fraction，and this maximum decreases with the increasing of temperature.
Key words: tantalum；ion-nitriding；phase
