文章编号：1004-0609(2001)S2-0006-05
NiTi形状记忆薄膜的应用及进展
(上海交通大学 国家教育部高温材料及测试开放实验室，上海 200030)
摘 要: 介绍了当前国内外NiTi薄膜在以微机电系统(MEMS)为主的诸多领域中的应用研究情况，分析了存在的问题，并展望了今后的发展前景。
关键字: NiTi薄膜； 形状记忆合金； 研究； 应用； 进展
Advancement in application research on
NiTi shape memory thin films
NiTi shape memory thin films
（Open Laboratory of Education Ministry for HighTemperature Materials and
Testing, Shanghai Jiaotong University, Shanghai 200030, P.R.China）
Abstract:A introduction to the latest progress in application research on NiTi shape memory thin film was made. Its potential application was prospected and some possible problems in future development was estimated.
Key words: NiTi thin film; shape memory alloy; research; application; advancement
