(1.福州大学现代物理技术研究所, 福州 350002;
2.国家科技部 高技术研究发展中心, 北京 100044)
摘 要: 介绍了国内外平板显示器, 特别是场致发射显示器(FED)的市场预测和主要研究单位以及FED显示器的基本制作工艺流程,包括阴极激活和真空镀膜技术, 论述了阴极激活技术及其对提高FED阴极发射能力的作用。采用丝网印刷、 真空镀膜和阴极激活技术与低逸出功材料结合增强发射场强的方法研制出能显示视频图像的20英寸(50.8 cm)单色FED显示器样机, 其亮度已达300 cd/m2,对比度已达400。并讨论了FED显示器今后可能的发展方向。
关键字: 场致发射显示器; 阴极激活; 电子发射;真空镀膜; 丝网印刷
(1. Institute of modern physical technology,
Fuzhou University Fuzhou 350002, China;
2. High-Tech R&D Center, National Department of Science and Technology, Beijing 100044, China)
Abstract:The market forecast and researching institutions of the flat panel display especially the Field Emission Display (FED) were introduced. The basic fabrication processes of FED were introduced, including cathode activation technology and thin film sputtering technology. The effects of the cathode activation technology on the enhancement of electron number emitted from the cathode surface were discussed in details. The FED panel was fabricated by using thin film sputtering, screen printing and cathode activation technologies. The cathode of FED prototype was activated with low work function materials. The activation process is lower than the work function of the cathode surface effectively and therefore the electron number increased dramatically emitted from the cathode surface. The prototype thus fabricated could display video images and moving pictures. Its screen brightness and contrast ratio are 300 cd/m2 and 400 respectively. The possible development of FED on its cathode materials and structure, and the overall fabrication technology were also discussed.
Key words: field emission display; cathode activation; electron emission; vacuum coating; screen printing