(清华大学 材料科学与工程系 先进材料教育部重点实验室，
北京 100084)
摘 要: 采用斜离子束辅助沉积(IBAD)方法制备了Co80Nb20合金薄膜， 研究了离子束入射角度对薄膜结构、 组织及磁性能的影响。 结果表明： 当离子束入射角度小于30°时形成fcc亚稳合金薄膜， 入射角增大到30°后转变为hcp固溶体； Co80Nb20薄膜均表现出平面易磁化特征， 在入射角小于75°时Co80Nb20薄膜矫顽力较小； 当离子束入射角度增大到75°后， 薄膜在平行膜面方向矫顽力明显增大， 而垂直膜面方向矫顽力减小。 从理论上讨论了离子束入射角度对原子混合、 热峰效应、 薄膜内应力及亚稳结构形成的影响。
关键字: 钴； 铌； 离子束辅助沉积； 入射角
（Key Laboratory of Advanced Materials of Ministry of Education,
Department of Materials Science and Engineering, Tsinghua University,
Beijing 100084, China）
Abstract: Co80Nb20 thin films were prepared by skew ion beam assisted deposition (IBAD). The influence of incidence angle on microstructure, morphology and magnetic properties was investigated. The results indicate that fcc metastable phase forms in the films deposited at incidence angle smaller than 30°. After the incidence angle increases to more than 30°, the samples are turned to be hcp phase. All Co80Nb20 samples exhibit in-plane easily magnetized character. When the incidence angle is smaller than 75°, the Hc of Co80Nb20 thin films is comparatively smaller. When the incidence angle reaches 75°, the Hc parallel to the film surface increases significantly while the Hc perpendicular to the film surface decreases simultaneously. The results were discussed according to the influence of skew incidence angle on atomic mixing, thermal spike, internal stress and the formation of metastable structures.
Key words: Co; Nb; ion beam assisted deposition; incidence angle
