( 1. 北京师范大学 射线束技术与材料改性教育部重点实验室，
北京100875;
2. 北京师范大学 材料科学与工程系, 北京 100875;
3. 南昌大学 物理系， 南昌 330047)
摘 要: 利用MEVVA磁过滤等离子沉积技术制备了纳米厚度的Fe颗粒薄膜， 并利用原子力显微镜和场发射扫描电子显微镜对其结构进行了系统分析。 分析结果表明, 由于磁过滤的作用， 所制备的Fe纳米薄膜结构均匀， 不存在由于电弧蒸发引起的大颗粒沉积现象。 等离子体不同沉积角度直接影响纳米薄膜的微观结构， 随着沉积角度从90°下降到30°， 纳米薄膜的结构由起伏变化的纳米聚晶结构逐渐转变为尺度和表面分布均匀的纳米晶结构。 经过高温热处理， 相比于垂直沉积的纳米薄膜， 30°倾斜沉积制备的薄膜微观结构中大晶粒的数量显著下降， 形成颗粒分布较好的纳米颗粒薄膜。
关键字: MEVVA技术； Fe纳米薄膜； 结构
（ 1. Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Beijing Normal University, Beijing 100875, China;
2. Department of Materials Science and Engineering, Beijing Normal University, Beijing 100875, China;
3. Department of Physics, Nanchang University, Nanchang 330047, China）
Abstract: The fabrication of Fe nano-films with MEVVA magnetically filtered plasma technique was investigated. The structures of Fe nano-films were systematically analyzed by the atomic force microscopy (AFM) and the field emission scanning electron microscopy (FESEM). The results show that the particle structures of Fe nano-film are well distributed because of the action of magnetic filter. The deposition angle of ions beam affects the microstructures of the films. The films with salient features become smooth and Fe nano-clusters are well distributed with the decrease of the deposition angle from 90° to 30°. Compared with the film produced under the normal incidence, the number of the large particles for films fabricated at the deposition angle of 30° decreases greatly and the nano-particles with better distribution and more uniform particle size are formed after high temperature treatment.
Key words: MEVVA technique; Fe nano-films; structure
