( 1. 西安交通大学 理学院, 西安 710049;
2. 河南科技大学 材料工程系, 洛阳 471039)
摘 要: 采用不同的磁控溅射和回火工艺制备了SmCo磁性薄膜。 用能谱仪对不同工艺溅射的样品进行了化学成分分析; 用透射电子显微镜和振动样品磁强计(VSM)研究了薄膜的显微结构和磁性能。 结果表明： 溅射态的薄膜为非晶态并具有软磁特征； 当回火温度位于400~ 450℃之间时， 薄膜的微观组织均匀细小， 且随着回火温度增加， 矫顽力增大， 并在450℃回火的样品中得到了最大的矫顽力。 回火温度500℃后， 薄膜微观组织中晶粒出现了不均匀粗化， 矫顽力明显降低。
关键字: SmCo薄膜；晶化； 显微组织； 磁性能
（1. Scool of Science, Xi′an Jiaotong university,
Xian 710049, China;
2. Materials Science and Engineering, Luoyang Institute, Luoyagn 471039, China）
Abstract: Amorphous SmCo magnetic films were fabricated by magnetron sputtering. The microstructures were observed by transmission electron micrographs and magnetic properties were measured by vibrating sample measurement(VSM). TEM micrographs of the films show that the microstructures are changed with the post-deposition annealing temperatures. The microstructures of the films become non-uniform as the annealing temperature is higher than 500℃. VSM measurements reveal that the films reach an optimum magnetic properties as the annealing process is 450℃, 30min.
Key words: SmCo film; crystallization; microstructure; magnetic properties
