( 湖南大学 材料科学与工程学院, 长沙 410082)
摘 要: 采用X射线吸收光谱研究了热丝化学气相沉积（CVD）合成的纳米金刚石薄膜和脉冲激光沉积的纳米SiC薄膜。结果表明：纳米金刚石薄膜的碳K边X射线吸收精细结构光谱显示的激发峰相当于微米金刚石薄膜的蓝移，是量子效应的显著特征，证明制备的是纳米金刚石薄膜，与高分辨透射电镜的结果完全吻合；纳米SiC薄膜的硅K边X射线吸收精细结构光谱和扩展X射线吸收精细结构光谱也显示了纳米薄膜短程有序的结构特征，表明获得的是纳米SiC薄膜。
关键字: 纳米薄膜；X射线吸收光谱；纳米金刚石；蓝移
nanoscale thin films
（ College of Materials Science and Engineering,
Hunan University, Changsha 410082, China）
Abstract: Nanodiamond films synthesized by hot-filament chemical vapor deposition method and SiC nanoscale thin film deposited by pulsed laser deposition were investigated by X-ray absorption spectroscopy. The results show that C K-edge NEXAFS of the nanodiamond film exhibits a blue-shifted exciton peak relative to that of microscale diamond film. These features are characteristics of quantum confinement behavior. The results confirm the presence of nanodiamond film as revealed by transmission electron microscopy. The Si K-edge NEXAFS and EXAFS of the SiC nanoscale thin film also exhibit a significant long-range disorder that is the character of nanoscale materials, i.e. the SiC thin film is a nanoscale thin film.
Key words: nanoscale thin film; X-ray absorption spectroscopy; nanodiamond; blue-shift
