沉积Ti-B-N薄膜的结构与性能
( 1. 西安交通大学 金属材料强度国家重点实验室，西安710049；
2. 慕尼黑工业大学无机材料化学研究所，慕尼黑D-85747)
摘 要: 研究了射频等离子体辅助化学气相沉积获得的Ti-B-N薄膜的微观组织结构和力学性能。结果表明：B的加入使Ti-B-N薄膜中出现TiN纳米晶、BN非晶和TiB2非晶（nc-TiN/a-BN/a-TiB2）的复相结构。Ti-B-N薄膜组织致密，晶粒细小，薄膜硬度显著提高。用球盘式磨损实验考察了薄膜的摩擦学特性。与TiN相比，Ti-B-N薄膜抗磨损性能有显著提高，磨损机制为微观切削与疲劳磨损共同作用，但摩擦系数较TiN稍高。
关键字: 射频等离子体辅助化学气相沿积；Ti-B-N薄膜；硬度；耐磨性
enhanced chemical vapor depostion
（ 1. State Key Laboratory for Mechanical Behavior of Materials,
Xi'an Jiaotong University, Xi'an 710049, China;
2. Institute for Chemistry of Inorganic Materials,
Technical University Munich, Munich D-85747, Germany）
Abstract: The microstructure and properties of Ti-B-N coatings prepared by radio-frequency plasma-enhanced chemical vapor deposition (rf-PCVD) were investigated. The coatings were characterized by energy dispersive X-ray analysis, X-ray diffraction, transmission electron microscopy, X-ray photoelectron spectroscopy and optical microscopy. Pin-on-disk tribometer and microscopic hardness tester were used to evaluate the mechanical properties of the coatings. The results show that the structure of the coatings is nanocomposite, where nanocrystalline TiN is embedded in the amorphous matrix of BN and TiB2. The micro-hardness of Ti-B-N coatings is much higher than that of TiN coatings. The wear resistance of Ti-B-N coatings with a certain addition of boron is remarkably increased, which is caused by the change of friction mechanism of the coatings, although its friction coefficient is a little higher than that of TiN.
Key words: plasma-enhanced chemical vapor deposition; Ti-B-N coating; hardness; wear-resistance
