Transactions of Nonferrous Metals Society of China The Chinese Journal of Nonferrous Metals

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中国有色金属学报

ZHONGGUO YOUSEJINSHU XUEBAO

第16卷    第1期    总第82期    2006年1月

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文章编号: 1004-0609(2006)01-0147-06
Cr-Si-Ni电阻薄膜在酸碱溶液环境中的电学稳定性
张玉勤, 董显平, 吴建生

(上海交通大学 材料科学与工程学院
教育部高温材料及测试重点实验室, 上海 200030
)

摘 要:  采用磁控溅射方法制备了Cr-Si-Ni电阻薄膜, 研究了薄膜在模拟酸性(0.1 mol/L HCl)和碱性(0.1 mol/L NaOH)溶液环境中的电学稳定性和长期使用可靠性。 结果表明: 在室温(25 ℃)时, 500 ℃热处理后的纳米晶结构薄膜在酸性溶液环境中比在碱性溶液环境中具有更优异的电学稳定性和长期使用可靠性。 在酸碱两种溶液中浸泡240 h后, 薄膜试样的相对电阻变化(ΔR/R)分别为0.96%和3.31%。 电化学实验和AES表面成分分析表明, 在酸碱两种溶液中薄膜表面都能够形成致密稳定的SiO2保护层, 而且酸性环境形成的钝化膜比碱性环境形成的钝化膜具有更好的腐蚀保护作用。

 

关键字:  电阻薄膜; 电学稳定性; 相对电阻变化; 腐蚀行为

Electrical stability of Cr-Si-Ni resistive films in
acidic and alkaline aqueous solutions
ZHANG Yu-qin, DONG Xian-ping, WU Jian-sheng

Key Laboratory for High Temperature Materials and Tests of Ministry of Education, School of Materials Science and Engineering, Shanghai Jiaotong University, Shanghai 200030, China

Abstract: Cr-Si-Ni resistive films were prepared by magnetron sputtering. Electrical properties stability and long-term reliability of the films in 0.1 mol/L HCl and 0.1 mol/L NaOH aqueous solutions were investigated, which simulated acidic and alkaline environments. The results reveal that the nanocrystalline films by annealing at 500 ℃ in acidic environments present much more excellent electrical stability and good long-term reliability than the films in alkaline environments at 25 ℃. After immersing the films in two solutions for 240 h, the relative resistance change (ΔR/R) of the films is 0.96% and 3.31%, respectively. The electrochemical measurements and AES results indicate that the surface of the films can both form a dense and stable SiO2 protective layer in acidic and alkaline solutions, and that the passive film in acidic environments exhibits much more protective effects on the films than that in alkaline environments.

 

Key words: resistive films; electrical stability; relative resistance change; corrosion behavior

ISSN 1004-0609
CN 43-1238/TG
CODEN: ZYJXFK

ISSN 1003-6326
CN 43-1239/TG
CODEN: TNMCEW

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