(广州有色金属研究院 材料表面工程研究所，广州 510651)
摘 要: 采用中频反应磁控溅射、离子束辅助方法沉积CrTiAlCN多元硬质薄膜，利用扫描电镜、俄歇电子谱、透射电镜及X射线衍射等技术对膜层的过渡层、界面及微观结构进行研究。结果表明：沉积制备的膜层为多层梯度过渡结构，成分深度分布及相结构分析证实，所制备的多元多层梯度膜与所设计的基体/Cr/CrN/CrTiAlN/ CrTiAlCN结构相吻合；在梯度过渡中，不同层之间界面体现为渐变过渡过程；沉积制备的多元多层梯度膜硬度高达26.31 GPa，膜/基结合力大于80 N，摩擦因数低至0.113，力学性能优良。
关键字: CrTiAlCN薄膜；磁控溅射；离子束辅助
（Institute of Surface Engineering, Guangzhou Research Institute of Non-ferrous Metals, Guangzhou 510651, China）
Abstract: CrTiAlN multi-composite hard films were deposited by ion beam assisted reactive mid-frequency magnetron sputtering. Auger electron spectroscopy, transmission electron microscopy, X-ray diffractometry and microhardness tester were used to investigate the interface, interlayer, microstructure and composition of the multi-composite hard films. The results show that the multi-composite hard films contain multilayer gradient structure that coincides with the designed structure of substrate/Cr/CrN/CrTiAlN/CrTiAlCN, the composition distribution changes gradually between the interface in interlayer. The hard films exhibit good comprehensive performance with micro-hardness of 26.31 GPa, adhesion strength of 80 N and friction coefficient of 0.113.
Key words: CrTiAlCN; thin films; unbalanced magnetron sputtering; ion beam assistance
