(哈尔滨理工大学 材料科学与工程学院，哈尔滨 150040)
摘 要:
关键字: 纳米复合薄膜；Al2O3；聚四氟乙烯；摩擦特性；表面改性
（School of Materials Science and Engineering, Harbin University of Science and Technology, Harbin 150040, China）
Abstract:Using ion implantation system PSⅡ and MEVVA80−10 ion implantation machine, Ag, Al2O3, PTFE, Al2O3/PTFE nanometer laminated films were prepared by RF magnetron sputtering and plasma beams into sedimentary. Using XRD, AFM/FFM and nanometer probe test method, the PTFE surface tribology characteristic of five kinds of modified films were studied. The results show that under the same test condition, Al2O3/PTFE nanometer laminated film’s damage depth made by the ion implantation technology is shallower than those of other samples, while the wear resistance increases at least 4 times. The chemical composition of aluminum ion implantation Al2O3/PTFE nanometer compound films is mainly Al, F, C, O and N. AlF3, Al2O3 and AlN peaks exist as well as C2F4 peak, and Al2O3 is γ-phase with body-centered cubic structure. The hardness of the film achieves 0.15, 0.19 and 0.65 GPa. The elastic modulus is 0.9, 1.5 and 2.2 GPa.
Key words: nanometer compound membrane; Al2O3; PTFE; tribology characteristic; superficial modification
