Transactions of Nonferrous Metals Society of China The Chinese Journal of Nonferrous Metals

您目前所在的位置:首页 - 期刊简介 - 详细页面

中国有色金属学报

ZHONGGUO YOUSEJINSHU XUEBAO

第18卷    第8期    总第113期    2008年8月

[PDF全文下载]        

    

文章编号:1004-0609(2008)08-1377-06
化学气相沉积TaC涂层的微观形貌及晶粒择优生长
陈招科,熊 翔,李国栋,肖 鹏,张红波,王雅雷,黄伯云

(中南大学 粉末冶金国家重点实验室,长沙 410083)

摘 要: 利用TaCl5-Ar-C3H6体系,采用X射线衍射技术和扫描电镜研究不同温度下化学气相沉积TaC涂层微观形貌及晶粒择优生长。结果表明:在800~1 200 ,随沉积温度升高,TaC颗粒从圆球形逐渐转变为多角形以及金字塔形多面体,而其晶体择优取向依次从无明显择优取向向<220><200>转变;利用生长参数αVAN DER DRIFT, MEAKIN的纳米级晶粒选择生长模型可较好地解释不同形貌的生长机制。当α=3时,薄膜会优先生长成<200>择优取向的金字塔晶粒;当α=1.5时,则容易生长成<220>取向的多角形晶粒。

 

关键词: TaC涂层;化学气相沉积;择优取向;微观形貌

Surface morphology of TaC coating prepared by chemical vapor deposition and preferential growth mechanism of TaC grains
CHEN Zhao-ke, XIONG Xiang, LI Guo-dong, XIAO Peng, ZHANG Hong-bo, WANG Ya-lei, HUANG Bai-yun

State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China

Abstract:TaC film was deposited by chemical vapor deposition technique at different temperatures with TaCl5-Ar-C3H6 system. The surface morphology and preferential growth of TaC crystals were investigated by X-ray diffractometry and scanning electron microscopy. The results show that within 800−1 200 ℃, TaC crystals of either ball-like particle with randomly preferential orientation, or dendrite with <220> orientation, or tetrahedral pyramid with <200> orientation are obtained with increasing of temperature. The preferential growth of TaC crystals can be fairly explained by the growth parameter α and VAN DER DRIFT model, MEAKIN model, selective evolution model at nanometric scale. The pyramidal shape crystals with <200> textures are formed at α = 3, while <220> formed at α = 1.5.

 

Key words: TaC coatings; chemical vapor deposition; preferential growth; surface morphology

ISSN 1004-0609
CN 43-1238/TG
CODEN: ZYJXFK

ISSN 1003-6326
CN 43-1239/TG
CODEN: TNMCEW

主管:中国科学技术协会 主办:中国有色金属学会 承办:中南大学
湘ICP备09001153号 版权所有:《中国有色金属学报》编辑部
------------------------------------------------------------------------------------------
地 址:湖南省长沙市岳麓山中南大学内 邮编:410083
电 话:0731-88876765,88877197,88830410   传真:0731-88877197   电子邮箱:f_ysxb@163.com