(1. 昆明理工大学 云南省新材料制备与加工重点实验室，昆明 650093；
2. 上海交通大学 材料科学与工程学院，上海 200030；
3. 昆明理工大学 机电工程学院，昆明 650093)
摘 要: 研究磁控溅射法制备的Cr-Si-Ni和Cr-Si-Ni-Al电阻薄膜在模拟的碱性环境(NaOH溶液)中，介质溶液浓度和温度对薄膜电学稳定性的影响及其机理。结果表明：经热处理后呈纳米晶结构的2种薄膜在低温低浓度的碱性溶液中具有较好的电学稳定性和耐腐蚀性能，但是，随着溶液浓度和温度的增大其电学稳定性和耐腐蚀性能急剧下降，特别是在高温高浓度的碱性溶液中薄膜在很短时间内就出现性能劣化现象；2种薄膜在低温低浓度的碱性溶液中能够迅速地在膜层表面形成稳定的钝化保护层，从而有效地抑制溶液离子对薄膜内层的进一步腐蚀；而在高温或高浓度的碱性溶液中薄膜表面难以形成稳定的钝化保护层。
关键字: CrSi(Ni, Al)；电阻薄膜；碱性环境；电学稳定性；腐蚀行为；劣化机理
（1. Key Laboratory of Advanced Materials of Yunnan Province,
3. School of Mechanical and Electrical Engineering,
Kunming University of Science and Technology, Kunming 650093, China
Abstract:Influence of solution concentration and temperature of the medium on electrical properties stability and degradation mechanism of magnetron sputtered Cr-Si-Ni and Cr-Si-Ni-Al resistive films were investigated in simulated alkaline environments. The results reveal that the nanocrystalline Cr-Si-Ni and Cr-Si-Ni-Al films in lower temperature and solution concentration of alkaline solutions have better electrical properties stability and corrosion properties. However, with increasing solution concentration and temperature of the medium solutions, the electrical properties stability and corrosion properties of the two types of films are decreased steeply. Especially, the degradation of the films can be observed in very short time in higher temperature and solution concentration of the alkaline solutions. The surface of the two types of films can form a dense and stable passive protective layer in lower temperature and solution concentration of alkaline solutions, and that the formed passive layer exhibits a good corrosion inhibition effects. Nevertheless, in higher temperature or solution concentration of the alkaline solutions, the formation of stable passive layer is very difficulty.
Key words: CrSi(Ni, Al); resistive film; alkaline environment; electrical stability; corrosion behavior; degradation mechanism
