中国有色金属学报(英文版)
Transactions of Nonferrous Metals Society of China
| Vol. 6 No. 3 September 1996 |
（1.Central South University of Technology, Changsha 410083
2.Research Laboratoryfor Inorganic Chemistry ofHungarian Academy of Sciences,H-1502, Budapest, Hungary）
Abstract:Nanosized amorphous Si3N4powders were prepared from the reaction between SiCl4 and NH3 in a RF plasma torch with a specific geometry. The experiments are aimed at studying the relationships between synthesis parameters and nitrogen content of the product, mass distributions of the product and the byproduct. The main experimental parameters included plasma power, the mole ratio of the reactants. The powder was characterized in terms of the chemical composition analysis and morphology observation. The crystallization behaviors were also investigated.
Key words: Si3N4 nanosized powder thermal plasma method
