Abstract:The crystallization of NiTi shape memory alloy sputter-deposition film in the course of sputtering-deposition and that after heat-treated were studied. The relationship between the process factors, such as substrate type, temperature, as well as the crystallization when heat treated after plating was investigated. The results show that a new phase precipitates during heat treatment after sputtering deposition and the degree of crystallization among different layers and the stress in grains are obviously different.

Key words: sputtering-deposition films; crystallization; shape memory alloys