中国有色金属学报(英文版)
Transactions of Nonferrous Metals Society of China
| Vol. 19 Special 2 September 2009 |
（1. School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China;
2. Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education,
Harbin Institute of Technology, Harbin 150080, China;
3. Elionix Inc., Tokyo 192-0063, Japan）
Abstract:Ion beam irradiation was adopted for surface treatment of the micro punch manufactured by precision machining. Ar plasma was used for the ion irradiation process, which was generated by the electron cyclotron resonance(ECR) equipment. The surface finish processes of micro punch were carried out at irradiation angles of 45˚ and 10˚, respectively. The surface roughness and topography were measured to estimate the quality of surface finish. The results show that the ion irradiation is very effective to reduce the surface roughness, which can be improved more significantly at irradiation angle of 10˚ than at 45˚. The technology of surface finish with ion beam irradiation is suitable for the surface treatment of micro die.
Key words: surface finish; ion beam; micro punch; surface roughness
