Transactions of Nonferrous Metals Society of China The Chinese Journal of Nonferrous Metals

您目前所在的位置:首页 - 期刊简介 - 详细页面

中国有色金属学报(英文版)

Transactions of Nonferrous Metals Society of China

Vol. 19    No. 6    December 2009

[PDF Download]        

    

Effects of nitrogen content on structure and electrical properties of nitrogen-doped fluorinated diamond-like carbon films
XIAO Jian-rong(肖剑荣)1, 2, 3, LI Xin-hai(李新海)1, WANG Zhi-xing(王志兴)1

1. School of Metallurgical Science and Engineering, Central South University, Changsha 410083, China;
2. Department of Physics and Maths, Guilin University of Technology, Guilin 541004, China;
3. Guangxi Key Laboratory of Information Materials, Guilin University of Electronic Technology,
Guilin 541004, China

Abstract:Nitrogen-doped fluorinated diamond-like carbon (FN-DLC) films were prepared on single crystal silicon substrate by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) under different deposited conditions with CF4, CH4 and nitrogen as source gases. The influence of nitrogen content on the structure and electrical properties of the films was studied. The films were investigated in terms of surface morphology, microstructure, chemical composition and electrical properties. Atomic force microscopy (AFM) results revealed that the surface morphology of the films became smooth due to doping nitrogen. Fourier transform infrared absorption spectrometry (FTIR) results showed that amouts of C=N and C≡N bonds increased gradually with increasing nitrogen partial pressure r (r=p(N2)/p(N2+CF4+CH4)). Gaussian fit results of C 1s and N 1s in X-ray photoelectron spectra (XPS) showed that the incorporation of nitrogen presented mainly in the forms of β-C3N4 and a-CNx (x=1, 2, 3) in the films. The current−voltage (IV) measurement results showed that the electrical conductivity of the films increased with increasing nitrogen content.

 

Key words: fluorinated diamond-like carbon films; nitrogen doping; structure; electrical properties

ISSN 1004-0609
CN 43-1238/TG
CODEN: ZYJXFK

ISSN 1003-6326
CN 43-1239/TG
CODEN: TNMCEW

主管:中国科学技术协会 主办:中国有色金属学会 承办:中南大学
湘ICP备09001153号 版权所有:《中国有色金属学报》编辑部
------------------------------------------------------------------------------------------
地 址:湖南省长沙市岳麓山中南大学内 邮编:410083
电 话:0731-88876765,88877197,88830410   传真:0731-88877197   电子邮箱:f_ysxb@163.com